A fire at Japanese industrial gas maker Kanto Denka Kogyo Co.’s factory is spurring concerns about possible disruptions to the semiconductor supply chain.
Last week, a fire broke out at Samsung Electronics Co. and Kioxia Holdings Corp. supplier Kanto Denka’s nitrogen trifluoride plant in Shibukawa in Gunma Prefecture, northwest of Tokyo. One worker died and another was injured, according to the company.
One of the plant’s two production lines sustained partial damages and operations have been suspended by authorities, a company representative said. Nitrogen trifluoride is a toxic gas used to clean substrate processing chambers